scoutCARBON is a fully automated system for real-time monitoring of organic impurities in semiconductor chemicals. scoutCARBON not only detects and identifies contaminants, it also quantifies and charts each contaminant.

Organic Contaminant Online Analyzer

• Quantitative analysis of targeted organic contaminants in inorganic and organic chemicals
• Identification and semi-quantification of non-targeted compounds
• A single central analyzer monitors:
  • Up to 40 sampling points
  • At up to 300 m in any direction
• Online monitoring of IPA, NH₄OH, H₂SO₄, H₂O, HF, H₂O₂, stripper, resist and others

Mass Spectrometric Detection

• Ultrahigh mass resolution: (+/-0.0001)
• Positive and negative ion modes
• 50-20,000 amu

Ease of Use

• Flexible data reporting options including SECS/GEM
• Automatic calibration

Workflow Diagram

Example diagram (shown to the right) for remote monitoring of incoming/outgoing chemicals and process chemicals using scoutCARBON.